专利名称：INCREASING THE GAS EFFICIENCY FOR AN
ELECTROSTATIC CHUCK
发明人：Vijay D. Parkhe申请号：US15667708申请日：20170803
公开号：US20170329352A1公开日：20171116
专利附图：
摘要：A gas is received through an inlet. A portion of the gas is supplied to anelectrostatic chuck. A portion of the gas is re-circulated through a compressor. Apressure of the second portion of the gas is increased. The second portion of the gas is
stored in a gas storage.
申请人：APPLIED MATERIALS, INC.
地址：Santa Clara CA US
国籍：US
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