MICROELECTROMECHANICAL PROBE AND PROBE HEAD HAVING

专利名称：MICROELECTROMECHANICAL PROBE AND

PROBE HEAD HAVING THE SAME

发明人：Shao-Lun WEI,Yu-Chen HSU,Mao-Fa

SHEN,Neng-Hsuan KUO,Chien-Yu LIN,Ching-Kai CHU

申请号：US15921214申请日：20180314

公开号：US20180267083A1公开日：20180920

专利附图：

摘要：A microelectromechanical probe has tail, head and body portions, and includes

a pinpoint layer having a planarized top surface where a structural layer having first andsecond sides, a cutting face and a front terminal surface adjoining the first and secondsides is disposed. The cutting face descends from the top surface of the structural layertoward the pinpoint layer to the front terminal surface. The front terminal surfaceextends from a front end of the cutting face to the top surface of the pinpoint layer. Thepinpoint layer has a pinpoint protruding over the front terminal surface and located atthe head portion. Within the head portion, the pinpoint layer is greater in hardness andless in electrical conductivity than the structural layer. The probe makes small probingmarks, is highly recognizable in an automatic pinpoint recognition process, and can beconveniently installed.

申请人：MPI CORPORATION

地址：CHU-PEI CITY TW

国籍：TW

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