Method for detection and scoring of hot spots in a

专利名称：Method for detection and scoring of hot

spots in a design layout

发明人：Chih-Ming Lai,Ru-Gun Liu,I-Chang Shin,Yao-Ching Ku,Cliff Hou

申请号：US11682640申请日：20070306公开号：US07685558B2公开日：20100323

专利附图：

摘要：A method for detection and scoring of hotspots in a design layout is provided. Aplurality of indices is derived for a plurality of positions in the design layout. The plurality

of indices comprises a first index sensitive to energy exposure of the design layout, asecond index sensitive to process image formation, and a third index sensitive to maskmanufacturing error. The plurality of indices is then analyzed to identify at least onehotspot in the design layout. The at least one hotspot is then prioritized using anintegrated hotspot scoring system. The integrated hotspot scoring system prioritizeshotspots based on a look-up table approach or an interpolation approach.

申请人：Chih-Ming Lai,Ru-Gun Liu,I-Chang Shin,Yao-Ching Ku,Cliff Hou

地址：Hsin-Chu TW,Hsin-Chu TW,Hsin-Chu TW,Hsin-Chu TW,Taipei TW

国籍：TW,TW,TW,TW,TW

代理机构：Haynes and Boone, LLP

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